202122/547 Supply of up to four dry etch and deposition systems
A Contract Award Notice
by UNIVERSITY OF LEEDS
- Source
- Find a Tender
- Type
- Contract (Goods)
- Duration
- not specified
- Value
- £2M
- Sector
- INDUSTRIAL
- Published
- 24 Aug 2023
- Delivery
- not specified
- Deadline
- n/a
Related Terms
Location
Leeds
1 buyer
- Leeds University Leeds
1 supplier
- Oxford Instruments Yatton
Description
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: • A Deep-Silicon Reactive Ion Etcher (D-RIE) • An Inductively Coupled Plasma-RIE (ICP-RIE) • A parallel plate RIE • A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Total Quantity or Scope
• A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD) Additional information: To respond to this opportunity please click here: https://neupc.delta-esourcing.com/respond/ZA5CH77BT9
Award Detail
| 1 | Oxford Instruments (Yatton)
|
Award Criteria
| price | _ |
CPV Codes
- 22520000 - Dry-etching equipment
Other Information
** PREVIEW NOTICE, please check Find a Tender for full details. ** To view this notice, please click here: <a href="https://neupc.delta-esourcing.com/delta/viewNotice.html?noticeId=804651228" target="_blank">https://neupc.delta-esourcing.com/delta/viewNotice.html?noticeId=804651228 GO Reference: GO-2023824-PRO-23716079
Reference
- ocds-h6vhtk-031776
- FTS 024931-2023